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Deposition

CECS 2-Gun UHV eBeam Evaporator
CECS 3-Gun Sputtering System
CECS 4-Gun Sputtering System
CECS 6-Gun Sputtering System
CECS ALD System
CECS Trion PECVD
CREOL Denton Desktop Pro Sputter
CREOL PlasmaTherm PECVD
CREOL Temescal eBeam Evaporator
CREOL V&N 400E eBeam Evaporator
MPF Evan eBeam Evaporator
MPF Simran eBeam Evaporator
MPF Trion PECVD

Lithography

CECS EVG 620 Mask Aligner
CECS Heidelberg DWL66+ Laser Writer
CECS Spin Coater
CECS Spray Coater
CREOL e-Beam Lithography
CREOL i-Line Stepper
CREOL Spin Coater
CREOL Suss MJB4 Mask Aligner
MPF OAI 200 Mask Aligner
MPF Spin Coater

Plasma Etch

CECS Ion Mill
CECS Jupiter II Tabletop RIE
CECS Samco RIE
CREOL Descum Asher
CREOL Oxford ICP Etcher
CREOL Takachi ICP Etcher
MPF Samco RIE
MPF Trion ICP Etcher

Thermal Processing

CECS Doping/Oxidation Furnaces
CECS Jetfirst Rapid Thermal Anneal
CECS Lindberg/Blue M Furnace
CECS TF1400 Vacuum Annealing Furnace
CREOL Despatch Oven
CREOL Modulab Furnace
CREOL Yamato DKN400 Forced Convection Oven

Characterization

CECS 3D Optical Profiler
CECS Dektak 150 Profiler
CECS Flexus F2310i Stress Measurement
CECS Hitachi SEM S-4700
CECS Woollam Ellipsometer
CREOL Dektak XT Profiler
CREOL Filmetrics TF Analyzer
CREOL Nikon Eclipse L150 Microscope

Others

CECS Ultrasonic Cleaner 1.9L
CECS Ultrasonic Cleaner 5.7L
CECS UniTemp Vacuum Sealer
CREOL Pelco FlexScribe
CREOL Ultrasonic Cleaner 1.9L
CREOL Ultrasonic Cleaner 2.8L
MPF Diamond Scriber
MPF Ultrasonic Cleaner 10L

UCF Research Cleanroom

12201 Research Parkway, Ste. 501
Orlando, FL 32826
407-823-3778