Location
CREOL Rm 180
Description
The MicroWriter ML3 is a compact, high-performance direct-write optical lithography tool tailored for R&D and clean-room environments. It eliminates the need for physical mask fabrication by projecting patterns directly via computer-controlled optics, enabling rapid prototyping of photoresist structures with resolutions down to sub-micron levels. With the virtual mask aligner mode, the pattern to be exposed is displayed on top of the real-time microscope image, allowing the machine to be used like a traditional mask aligner. The system is housed in a temperature-stabilised, light-excluding enclosure with safety interlock, making it well suited for clean-room workflows.
Configuration/Specifications
Maximum writing (exposure) area: 195 mm × 195 mm
Minimum feature (resolution) options: 0.6 µm, 1 µm, 2 µm and 5 µm
Light-source: 385 nm long-life semiconductor LED
Writing speeds (typical): up to ~25-30 mm²/min at 0.6 µm, ~50 mm²/min at 1 µm, ~100 mm²/min at 2 µm, ~180 mm²/min at 5 µm.
Autofocus system: Yellow-light autofocus tracks surface height variations and compensates for bowed/irregular substrates
256 level grey scale mode
File formats: CIF, GDSII, BMP, TIFF, JPEG, PNG, GIF
Virtual mask aligner mode
Substrate size
200mm diameter max, pieces
SOP
SNSF Video Tutorial
Make
Durham Magneto Optics
Model
MicroWriter ML3
Rate
CREOL Tier-1