NEW INSTRUMENTATION
The Orion III PECVD system is now operational in the CECS cleanroom.
Silane (SiH₄), ammonia (NH₃), and nitrous oxide (N₂O) gases are available for silicon oxide (SiOₓ) and silicon nitride (SiNₓ) film deposition.
The ML3 MicroWriter is now operational in the CREOL cleanroom.
This 385nm direct-write lithography system supports substrates ranging from small chips up to 8-inch wafers and features greyscale exposure capabilities. The system offers a minimum feature size of 0.6um, providing a high-resolution, maskless solution for complex patterning.
The GCA8500 i-line Stepper is now operational in the CREOL cleanroom.
This 365nm projection lithography system offers a 0.75 μm resolution and a 5:1 reduction ratio for precise, high-fidelity device fabrication. Utilizing 5-inch quartz masks, the system provides a stable and repeatable solution for researchers requiring consistent sub-micron patterning.
LINKS
- Training request
- Tool reservation calendar
– send an email to “UCFcleanrooms@ucf.edu” if you are a qualified user and do not have access - Microsoft Teams CECS Cleanroom
- Microsoft Teams CREOL Cleanroom
- Microsoft Teams MPF Cleanroom
- EHS courses
- EHS Lab Safety Manual
OPPORTUNITIES
SMART
SMART (Semiconductor Manufacturing and Advances in Recent Technologies) is a hands-on educational initiative hosted annually by UCF’s Department of Electrical and Computer Engineering. Designed to support the growth of the U.S. semiconductor workforce, SMART offers students and educators in engineering an intensive summer workshop focused on semiconductor fabrication, process technology, and emerging innovations in the field. Participants gain practical cleanroom experience, engage with leading industry experts, and explore pathways to careers in semiconductor manufacturing through direct connections with partners like Intel and Texas Instruments. Click here for more information.
Undergraduate Scholarship
The Department of Electrical and Computer Engineering offers undergraduate scholarship opportunities sponsored by leading companies in the semiconductor and microelectronics industries. These positions are designed for students who are passionate about gaining hands-on experience in cleanroom operations and preparing for careers in advanced manufacturing and research. Selected students will assist cleanroom staff with equipment operation, maintenance, and general lab support. For application details, please click here.