Fees

Billing Details
Our facilities bill monthly and the invoices can be expected by the second week of the following month. The usage logs are compiled into invoices that can be paid for with a University account or by a check made out to University of Central Florida and mailed to the following address:

Facility Fee
Our facilities have a daily fee for cleanroom garments, consumables, and access to common cleanroom instruments.

We provide general cleanroom PPE, wipes, pipettes, IPA, and acetone. Users are responsible for providing all other project-specific consumables, including required chemicals, glassware, and deposition materials.

Instrument Usage
We charge based on an instrument tier system. Each equipment is charged per use according to its tier usage rate.

Internal Rates
External Rates

Definition of “Per Use”
• A use is defined as one continuous equipment session, regardless of how many samples, wafers, or recipes are processed
• A session begins when a user initiates activity on the tool (e.g., login, pump-down, recipe start, exposure, or measurement) and ends when the user completes their work, logs out, and leaves the tool available for the next user.
• All processing completed within a single continuous session or reservation block (including multiple recipes, wafers, or measurement sites) is billed as one use.
• Raith EBL: Each vent event constitutes one individual session. If a user vents the system/load lock to change samples or holders, each vent cycle is billed as a separate “use,” regardless of whether the activity occurs within a single calendar reservation or continuous booking block.

Examples
• Mask aligner: Multiple exposures during one login = one use.
• PECVD: Several deposition recipes run back-to-back in a session = one use.
• Etcher (ICP/RIE): Multiple etch steps or samples in a session = one use.
• Profilometer/ellipsometer/SEM: Any number of measurements during a session = one use.
• EBL: Loading samples, running an exposure, venting to swap holders, and pumping down again = 2 uses (due to 2 vent cycles).