Location
CREOL Rm 180A
Description
The Cressington 108 Sputter Coater has fully variable current control, digital process timer with “pause”, variable height specimen table, hinged top-plate and o-ring sealed vacuum chamber. The current controller allows independent choice of sputter current and argon pressure. It offers rapid pumpdown times, fine-grain coatings and negligible sample heating. Cool, fine-grain sputtering is achieved with a very efficient dc magnetron head. The variable, safety-interlocked sputtering supply is not influenced by vacuum level.
Configuration/Specifications
Chamber size: 4.75″ x 4.75″
Sputter head: Low voltage planar magnetron
Sputter target: Au (user supplied)
Vacuum: Atm – 0.001mb
Current: 0 – 50 mA
Manual gas and current control
Digital timer: 5-300 seconds with pause
Substrate size
4″ substrates
Standard Operating Procedure
Make
Cressington
Model
Sputter Coater 108
Rate
CREOL Tier-1