Location
Engineering 1, Rm 124
Description
The Neocera Pioneer 180 is a high-performance, stand-alone Pulsed Laser Deposition (PLD) system specifically engineered for the growth of epitaxial films, multilayer heterostructures, and superlattices. While versatile across various materials, it is most optimally configured for the deposition of metal-oxide films. The system features a UHV-compatible 18-inch stainless steel spherical chamber and integrates fully automated controls for precise material engineering.
Configuration/Specifications
Laser Source: Quantel Q-Smart 850 frequency-quadrupled Nd:YAG solid-state laser
– Wavelengths: Primary output at 266 nm, with an integrated frequency doubler capable of delivering 532 nm
– Pulse Dynamics: 100 mJ maximum pulse energy at 266 nm with a tight 5 ns pulse width
– Repetition Rate: Up to 10 Hz, fully adjustable via software to lower frequencies (e.g., 1, 2, or 5 Hz) for precise growth rate control.
Base Pressure: 5×10-7 Torr or lower
Maximum Temperature: 850 °C via radiative heating
Automated 6-target carousel (supports six 1-inch or three 2-inch targets)
Computer-controlled target selection, rotation (20 RPM max), and rastering (30°/sec max)
Motorized Z-stage allowing target-to-substrate distance adjustments between 75 mm and 165 mm
Integrated MKS mass flow controller for Oxygen (200 SCCM max)
Substrate size
2 inches in diameter.
360-degree motorized rotation controlled via software
Standard Operating Procedure
Make
Neocera
Model
Pioneer 180
Rate
CECS Tier-3