Location
Physical Sciences Building Rm 440
Description
Used for optical coatings and materials incompatible with electronic devices.
Configuration/Specifications
4 interchangeable pockets under vacuum
Maximum Power: 3kW
Ultra-High Vacuum Turbo Pump
Recommended crucible/liner: International Advanced Materials 3C-2-04 (2cc)
Top Dia – 0.75″ Height – 0.375″ Wall – 0.09″
Substrate size
4″ substrates
Standard Operating Procedure
Make
Thermionics
Model
TLG-6000
Rate
MPF Tier-3