Location
Physical Sciences Building Rm 440
Description
Custom built
Configuration/Specifications
Tilt-stage 90 degrees
4 interchangeable pockets under vacuum
O2 oxidation capability
Sweep Functionality
Ultra-High Vacuum Cryopump
Maximum Power: 8kw
Recommended crucible/liner: EVCEB-23 Graphite Crucible Liner
1.125″ Top OD X 0.520″ High X 0.093″ Wall, 15 Deg Wall Angle, 7cc Pocket Vol, 3.7cc Liner Vol
Substrate size
4″ substrates
Standard Operating Procedure
Make
Custom built
Model
Custom built
Rate
MPF Tier-3