Location
CREOL Rm 180
Description
A robust and precise programmable convection oven, the DKN‑400 uses forced-air circulation to maintain stable temperatures between room temp + 10 °C and 260 °C, making it ideal for semiconductor and cleanroom thermal processes. It features PID control with 30-program memory, self-diagnostics (including auto-tune, calibration offset, and overheat protection), and visible/alarm alerts to ensure reliability. The roomy stainless steel chamber, adjustable shelving, and observation window support consistent wafer handling and processing.
Configuration/Specifications
Temperature range: Room + 10 °C to 260 °C
Accuracy / Uniformity: ±1.0 °C (at 210 °C)
Heat-up time: ~60 min from ambient to 260 °C
Shelf load: ~15 kg per shelf; 2 shelves (user-adjustable across 11 positions)
Substrate size
Chamber volume: ~90 L (3.2 cu ft)
Internal dimensions: 450 × 400 × 400 mm (W × D × H)
Make
Yamato
Model
DKN-400
Rate
CREOL Facility Use