Location
CREOL Rm 180
Description
Custom eBeam by V&N Automation systems
Configuration/Specifications
Leybold turbo pump
Telemark Programmable Sweep Controller
Recommended crucible/liner: International Advanced Materials 8C-4-03 (4cc)
Top Dia – 0.889″ Height – 0.59″ Wall – 0.093″
Substrate size
4″ substrates
Standard Operating Procedure
Make
V&N Advanced Automation Systems
Model
400E
Rate
CREOL Tier-2