Location
CREOL Rm 180A
Description
The MDL ModuLab 906 furnace is a manual tube furnace designed for semiconductor processing applications, particularly thermal oxidation of silicon wafers. Capable of operating in ambient, dry oxygen, or steam environments for oxide layer growth.
Configuration/Specifications
1200C
Substrate size
4″ wafers
Standard Operating Procedure
Make
Materials Development Laboratory
Model
Modulab 906
Rate
CREOL Facility Use