Location
CREOL Rm 180
Description
The Dimension 3100 AFM is a highly capable atomic force microscope used for nanoscale surface characterization. It provides high-resolution 3D topography imaging and advanced surface property measurements across a range of materials. The system supports multiple imaging modes—such as tapping and contact modes—and is suitable for analyzing surface morphology, roughness, and functional properties on various sample types including semiconductor wafers and nanostructures.
Configuration/Specifications
– Imaging Mode: Tapping only
– Scan Size: Piezo scan range typically up to ~90 µm × 90 µm in XY with ~6 µm Z range
– Optical Viewing: Motorized optical microscope with zoom, field of view ~180–810 µm
– Stage Positioning: Motorized X-Y stage with ~100 mm × 120 mm inspectable area and ~2 µm resolution (varies with setup)
– Resolution: Sub-nanometer vertical resolution with 16-bit data acquisition
Substrate size
up to 150mm diameter
Make
Veeco/Bruker
Model
Dimension 3100
Rate
CREOL Tier-3