Location
CREOL Rm 180
Description
The Despatch Protocol Plus is a high-precision, cleanroom-compatible oven designed for controlled thermal processing in semiconductor, photonics, and MEMS fabrication environments. It provides consistent, uniform heating for applications such as bake, cure, and annealing processes
Configuration/Specifications
Process Type: High-uniformity convection oven
Temperature Range: Ambient to 260°C (500°F)
Temperature Uniformity: ±1.5°C at 200°C
Substrate size
4″ substrates
Operations Manual
Make
Despatch
Model
Protocol Plus
Rate
CREOL Facility Use