Location
CREOL Rm 180
Description
The Denton Desktop Pro is a high-vacuum magnetron sputtering system designed for research and development applications. It supports both DC and RF sputtering, enabling the deposition of a wide range of materials including metals, magnetic films, and dielectrics. Its confocal configuration with one or two cathodes ensures excellent film uniformity and process flexibility.
Configuration/Specifications
13.56Mhz RF generator
O2, Ar, N2 sputtering gas
Substrate size
4″ substrates
Operations Manual
Make
Denton
Model
Desktop Pro
Rate
CREOL Tier-2