Location
CREOL Rm 180
Description
The Apogee 200 Spin Coater is a high-performance, benchtop spin coating system designed for research and advanced process development in cleanroom environments. Featuring a full-colour 7-inch touchscreen interface, DataStream™ connectivity, and a chemical-resistant HDPE spin bowl, this tool delivers consistent and repeatable thin film coatings. It will be primarily used for coating substrates for the stepper and Raith e-beam.
Configuration/Specifications
100mm handheld centering device
4-position dispense control box
EBR tank, drain carboy
Spin speed: up to 12,000 rpm
Spin speed repeatability: 0.2 rpm
Spin speed resolution: 0.2 rpm
Acceleration resolution <0.2 rpm/s
- 0-30,000 rpm/s unloaded
- 0-13,000 rpm/s with a typical 200 mm substrate
- 0-3,000 rpm/s with a 6” x 6” x 0.025” photomask in a recessed chuck
Substrate size
up to 200mm diameter
5” x 5” masks
Standard Operating Procedure
Make
CEE
Model
Apogee 200
Rate
CREOL Facility Use