Location
Engineering 1, Rm 124
Description
The Across International TF1400 is a versatile, high-temperature tube furnace designed for material research, annealing, and thermal processing applications in semiconductor, photonics, and MEMS fabrication. Its precise temperature control and robust build make it ideal for cleanroom and laboratory environments.
Configuration/Specifications
Max Temperature: 1400°C
Ar, 3% H2/Ar
Substrate size
4″ substrates
Operations Manual
Make
Across International
Model
TF1400
Rate
CECS Tier-3