Location
Engineering 1, Rm 124
Description
The Lindberg Blue M is a versatile, high-temperature tube furnace designed for thermal processing applications. It provides stable, uniform heating in a controlled atmosphere for semiconductor and photonic device fabrication.
Configuration/Specifications
1100degC
2% O2/Ar, O2, N2, bubbler
Substrate size
3″ substrates
Operations Manual
Make
Lindberg/Blue M
Model
STF55666C-1
Rate
CECS Facility Use