Location
Engineering 1, Rm 124
Description
The March Jupiter II is a versatile reactive ion etching (RIE) system designed for precision anisotropic and isotropic etching of a wide range of materials. Commonly used for applications in photonics, MEMS, and microfabrication, the system offers reliable performance for etching dielectric, polymer, and photoresist materials.
Configuration/Specifications
SF6, N2, O2
Substrate size
4″ substrates
Standard Operating Procedure
Make
March Instruments Inc
Model
Jupiter II
Rate
CECS Tier-1