Location
Engineering 1, Rm 163
Description
The Jetfirst RTP 150 is table-top, lamp-heated Rapid Thermal Process (RTP) tools used for annealing, and general thermal processing.
Configuration/Specifications
These tools are designed for heating up to 800°C with rise times up to 15°C/sec but can only support short dwell times (<10-15mins) at maximum temperature.
Substrate size
4″ substrates
Make
Jipelec
Model
JetFirst 150
Rate
CECS Tier-3