Location
Engineering 1, Rm 163
Description
The Hitachi S-4700 is a high-resolution field emission scanning electron microscope designed for detailed surface imaging and characterization at the nanoscale. It provides excellent imaging capabilities for materials research, semiconductor analysis, and device inspection.
Configuration/Specifications
Electron Source: Cold Field Emission Gun (FEG)
Accelerating Voltage: 0.5 kV to 30 kV
Resolution:
1.5 nm at 15 kV
2.0 nm at 1 kV
Magnification Range: 20× to 800,000×
Detectors:
Secondary Electron Detector (SE)
Backscattered Electron Detector (BSE)
Stage Movement:
X-Y: 75 mm
Z: 5 mm to 40 mm
Tilt: -10° to +90°
Rotation: 360°
Substrate size
4″ substrates
Operations Manual
Make
Hitachi
Model
S-4700
Rate
CECS Tier-4