Location
Engineering 1, Rm 163
Description
The Dektak 150 is a high-precision stylus profilometer used for surface topography and step height measurements in microfabrication and thin film processes. It enables non-destructive surface characterization with excellent repeatability, ideal for research applications in semiconductors, photonics, and MEMS.
Configuration/Specifications
Measurement Type: Stylus surface profilometry
Scan Length Range: 55mm (2.16in.)
Data Points Per Scan: 60,000 maximum
Max. Wafer Size: 150mm (6in.)
Step Height Repeatability: 6Å, 1 sigma on 1µm step
Vertical Range: 524µm (0.02in.) standard
Vertical Resolution: 1Å max. (at 6.55µm range)
Substrate size
6″ substrates
Operations Manual
Make
Bruker/Veeco
Model
Dektak 150
Rate
CECS Tier-2