Location
CREOL Rm 180
Description
The Bruker Dektak XT is a high-resolution stylus profilometer used for precise surface topography measurements. It enables accurate step height, roughness, and thin film thickness characterization, making it essential for semiconductor, MEMS, and thin film research.
Configuration/Specifications
Stylus Type: Type B stylus (typically 2 µm tip radius)
Measurement Range: Up to 1 mm vertical range
Vertical Resolution: <1 nm
Lateral Resolution: Determined by stylus radius (typically 2 µm)
Stylus Force: Adjustable, typically 1–15 mg
Scan Length: Up to 55 mm
Repeatability: 0.4 nm (1 sigma)
Substrate size
4″ substrates
Operations Manual
Make
Bruker
Model
Dektak XT
Rate
CREOL Facility Use