Location
CECS Rm 163
Description
The VK-X3000 3D Surface Profiler uses a triple scan approach, where laser confocal scanning, focus variation, and white light interferometry measurement methods are used, so that high-accuracy measurement and analysis can be performed on any target. It allows for measurement of the overall shape of the target while still maintaining high-resolution for analysis of minute surface features. 3D Surface Profiler can handle any target, including those with transparent or mirrored surfaces, large height changes, or steep angles.
Configuration/Specifications
Height measurement range: 7 mm
Display resolution:
1 nm (laser confocal/focus variation)
0.01 nm (white light interference)
Substrate size
4″ wafers
Make
Keyence
Model
VK-X3050
Rate
CECS Tier-1