Location
Engineering 1 Rm 124
Description
This custom-built system from AJA International closely matches the specifications of the ATC-2200E series, featuring a cylindrical UHV-style chamber. It is equipped with multi-pocket linear UHV electron beam evaporation sources, enabling high-purity thin film deposition. The system also includes a turbo molecular pump (TMP) and load-lock capability, ensuring excellent vacuum integrity and minimizing downtime between deposition runs.
Configuration/Specifications
5-pocket linear electron beam guns with a pocket capacity of 7 cc for the evaporation of most materials.
Power supply rated at 1A @ 10kV.
Use of toxic materials is strictly prohibited in this system.
Substrate size
4″ substrates
Make
AJA International
Model
ATC-2200V-EB Custom Sputtering System
Rate
CECS Tier-3